EUV finally makes it
- 著者:Ella Cai
- 公開：:2017-08-18
With the achievement of a 250W light source, ASML is now shipping 100 wafer per hour EUV machines and expects to go to 125wph later this year. Next year, the plan is to go higher.
So, after a tortured development period, EUV enters the production process at 7nm.
GloFo and TSMC are expected to insert the tool in the second iteration of their 7nm process.
Samsung will use it in the first version of their 7nm process.
ASML will ship 12 EUV systems this year and 20 next year.
So, after a tortured development period, EUV enters the production process at 7nm.
GloFo and TSMC are expected to insert the tool in the second iteration of their 7nm process.
Samsung will use it in the first version of their 7nm process.
ASML will ship 12 EUV systems this year and 20 next year.
